Information-Theoretic Causal Modelling of Semiconductor Process Dynamics

Excerpt

arXiv:2608.14678v1 Announce Type: cross Abstract: With the progress of the semiconductor industry toward increasingly complex compute devices and tighter process tolerances, advanced process control has become crucial. This work explores a novel framework to infer the underlying dynamics of semiconductor processes, directly from raw equipment log-file time-series data. By modelling the tool dynamics as a stochastic dynamical system comprising (a) a deterministic component and (b) a stochastic co